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Substrate stage of substrate processing apparatus and substrate processing
Provided is a substrate processing apparatus including a partitioned susceptor and configured to heat a substrate uniformly for improving process quality and...
Actuator for contactor
An actuator for a contactor comprises an electromagnet having a closing coil, a holding coil, fixed cores wound with the closing coil and the holding coil...
Differential signal transmission cable and method of making same
A differential signal transmission cable includes two core wires, and a foamed insulation that collectively covers the two core wires by foaming extrusion...
Pattern matching method, image processing device, and computer program
In order to provide a computer program, an image processing device, and a pattern matching method that perform pattern matching at a high level of accuracy...
Personal authentication device
A compact authentication device that prevents user from feeling pressure and is strong against external light, when capturing an image of a finger blood vessel...
Person detection system
Detection of a specific person with a specific person detecting system using surveillance cameras installed in various environments has not been successfully...
Ultrasonic inspection method and ultrasonic inspection device
An ultrasonic inspection method and an ultrasonic inspection device allow three-dimensional inspection data and three-dimensional shape data to be appropriately...
Pressure transmitter and transmission method
Hydrogen which has entered into a pressure/differential pressure transmitter from external or internally generated hydrogen and hydrocarbons are converted to...
Engine and engine-operated working machine
In an engine including a cooling fan provided at one end of a drive shaft to cool the engine, a muffler is attached such that a longitudinal direction thereof...
Mounting/dismounting jig for combustor tail pipe and tail pipe
Provided is a tail cylinder attaching and detaching fixture that attaches and detaches a tail cylinder to and from a casing, the tail cylinder being included in...
An excavation machine having a cutter head with a large diameter while making it possible to excavate excavation objects such as hard bedrock etc. with high...
An engine (10) electronically controlled by a control device (33), a hydraulic motor (24) for traveling which is driven by a pressurized oil delivered from a...
Method of producing rack of electric power steering device
A method of producing a rack is proposed, which comprises aligning a first bar piece, an intermediate piece and a second bar piece in order along a common axis;...
A shock absorber includes a first passage (111) or (112) and a second passage (32), (99) or (235) in communication with each other and configured to allow a...
Ultrasonic probe and ultrasonic imaging apparatus using the same
In order to provide an ultrasonic probe capable of suppressing the influence of multiple reflections occurring on the interface of a transducer with a CMUT chip...
Tissue insertion type ultrasonic probe
An ultrasonic probe for supporting spine surgery serving as a tissue insertion type ultrasonic probe comprises an insertion unit and an operation unit. On a...
Biological optical measurement instrument and reference image display
The biological optical measurement instrument is provided with a mobile position sensor that can move in a 3-dimensional space and that detects spatial position...
Electric power conversion apparatus
An electric power conversion apparatus includes a channel case in which a cooling water channel is formed; a double side cooling semiconductor module that has...
Power distribution mounting component and inverter apparatus using same
The present invention is a power distribution mounting component operable at high voltages. More specifically, the power distribution mounting component...
Wireless communication system, wireless communication method, and gateway
User traffic transmitted and received by a mobile station is distributed so as not to be converged on a gateway. The gateway includes a signaling processing...
Communication apparatus and communication method
In an exemplary communication apparatus, an assignment module determines whether processing for a second packet assigned the flow ID associated with a received...
Chassis type switch
A chassis type switch is provided which can shorten a time required for switching-over to a backup route when a failure has occurred in a line card. In a...
Management server and management method
To identify a logical topology of each virtual network among logical topologies of a plurality of virtual networks configured in physical devices. A management...
Transmitting device, receiving device, and signal processing method in
radio communication system
A radio communication system using an orthogonal frequency division multiplexing system, including: a baseband unit; and one or plural remote radio units...
Motor controller, air compressor, air conditioner, controller of passenger
conveyor and controller of conveyor
Disclosed is a motor control apparatus for controlling a synchronous motor, which includes a receiver section for receiving the value detected by a temperature...
A battery pack (21A) according to embodiments of the present invention comprises a plurality of battery modules (11A-11D) connected to each other in either one...
Semiconductor package having a metal member and a resin mold, which are
bonded to a silane coupling agent and...
Reliability is improved by improving adhesiveness, crack resistance, and moisture resistance of a metal member-resin jointed body by enhancing adhesiveness...
Surface observation apparatus and surface observation method
A surface observation apparatus is achieved, which enables even a beginner to easily select an optimal evaluation indicator for each of various patterns to be...
Method of manufacturing semiconductor device, substrate processing method,
computer-readable medium with...
A method of manufacturing a semiconductor device is provided, including: forming an oxynitride film having a specific film thickness on a substrate by...
Method for controlling plasma processing apparatus
There is provided a method for controlling a plasma processing apparatus that eliminates a preliminary study on a resonance point while maintaining a low...
Pattern dimension measuring device, charged particle beam apparatus, and
The present invention aims at providing a pattern dimension measuring device that realizes the measurement of a dimension of a pattern difficult to set up a...
Differential signal transmission cable, multiwire differential signal
transmission cable, and differential...
A differential signal transmission cable includes an insulated wire including a pair of differential signal transmission conductors coated with an insulation, a...
Image display device for medical applications, image display method for
An image display device such as a medical image display device is provided for supporting that information necessary for diagnosis is sufficiently displayed and...
Similar image search system
Disclosed is a similar facial image search system which is less susceptible to bias in search results even when there is a difference in the angle from which a...
Storage apparatus and command control method
A storage apparatus which contains a plurality of microprocessors includes a virtual queue which stores a virtual command which is used in the storage...
Computer system to migrate virtual computers or logical paritions
A hypervisor as a movement source stores key information, and the key information is registered in a storage using the stored key information through a logical...
Path interference and generation device and method
In devices for generating a path of a tool of a processing machine by way of computer simulation, an NC program is created using a generated processing path....
Positive photosensitive resin composition, method for producing patterned
cured film and electronic component
A positive photosensitive resin composition including: (a) a resin capable of being dissolved in an aqueous alkaline solution; (b) a compound having two or more...
Automatic analyzer using a sample container having an information
A sample is contained in a sample container and a physical relationship between the sample and a sample ID thereof is established. However, after the sample ID...
Internal defect inspection method and apparatus for the same
An internal defect inspection method where an ultrasonic wave is emitted from an ultrasonic wave transmitter toward a sample, the ultrasonic wave reflected by...
A flowmeter that improves a corrosion resistance is provided. The flowmeter includes a silicon substrate having a diaphragm where a heater is formed, an...
Control device and control method of compressor
A control device of a compressor includes a valve control unit configured to control an anti-surge valve that returns fluid in a discharge side of the...
Scroll fluid machine having a sealed compression chamber
A scroll fluid machine is provided that includes: a fixed scroll; an orbiting scroll opposed to the fixed scroll, the orbiting scroll orbiting with a plurality...
Variable displacement pump
Variable displacement oil pump for supplying oil to an internal combustion engine. Included is a cam ring having an inner peripheral section for accommodating...
Control apparatus and control method for internal-combustion engine
A control apparatus and a control method diagnose whether an internal-combustion engine is rotated in forward or reverse directions is being properly...
Connection structure of exhaust chamber, support structure of turbine, and
In a gas turbine, an exhaust casing and an exhaust chamber are connected by an exhaust chamber support that can absorb thermal expansion, and the exhaust...
Valve timing control apparatus for internal combustion engine
A valve timing control apparatus including a housing, a vane rotor rotatable relative to the housing toward a phase-advance side and a phase-retard side, a...
Hydraulic control device for work machine
A hydraulic control device for work machine includes: a driving device that generates a driving force for traveling of the work machine; a park braking device...
Information management system for construction machine
The present invention provides an information management system suitable for a construction machine, which drives a solenoid valve separately from normal...
Resin composition, and printed wiring board, laminated sheet, and prepreg
There are provided a resin composition including: (a) a maleimide compound with at least two N-substituted maleimide groups per molecular structure; and (b) a...